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Note: Guaranteed collocated multimode control of an atomic force microscope cantilever using on-chip piezoelectric actuation and sensing
- Ruppert, Michael G., Yong, Yuen K.
Development of a MEMS position transducer using bulk piezoresistivity of suspensions
- Bazaei, Ali, Maroufi, Mohammad, Mohammadi, Ali, Moheimani, S. O. Reza
Self-sensing electrostatic drive in a MEMS nanopositioner for the application of vibration control
- Moore, Steven I., Moheimani, S. O. Reza
Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes
- Bazaei, Ali, Mohammadi, Ali, Moheimani, S. O. Reza
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